System and method for optical measurement

用于三维光学测量的系统和方法

Abstract

一种光学测量系统,组合使用光学干涉仪(406)与光学自准直仪(408),以增加用发出单束激光(403)的激光器(400)进行的平移、摇摆和俯仰测量数。用干涉仪(406)内的条纹计数器(426)进行平移测量。用自准直仪(408)内的侧向效应光电二极管(434)进行摇摆和俯仰测量。回射的目标物光束(409)内的角偏离效应可通过反向望远透镜组件(428)最小化,从而可在不显著降低平移测量精度的情况下测量更宽的角度范围。

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Cited By (2)

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    CN-103471508-ADecember 25, 2013上海微电子装备有限公司一种剪切位移散斑测量方法及装置
    CN-103471508-BJune 01, 2016上海微电子装备有限公司一种剪切位移散斑测量方法及装置